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This needle valve is engineered for a wide range of specialty and high-purity gases:
High-Purity Gas 316L Needle Valves for High-Tech Applications:
| Parameter | Description |
|---|---|
| Material | ASTM A182 F316L; Electropolished (Ra ≤ 0.2μm) to minimize particle retention. |
| Purity Level | Meets semiconductor standards: THC ≤ 1 ppb, Moisture ≤ 1 ppb, Particulate (≥ 0.2μm) ≤ 1 particle/100 mL. |
| Design | Precision-machined needle tip; Soft-seal (PTFE/Vespel®) or metal-to-metal seal; Bubble-tight stem seal. |
| Operating Conditions | Vacuum to 6000 psi (413 bar); Temp: -40°C to 150°C (PTFE) or 450°C (Metal); Turndown ratio ≥ 100:1. |
| Standards | ASME B16.34, ISO 14644-1 (Cleanroom), NACE MR0175, USP Class VI. |
| Testing | Helium mass spectrometer leak test: ≤ 1×10⁻⁹ atm·cc/s; Air pressure test: 1.5× working pressure. |